Electroless Deposition of Noble Metal Nano Particles as Catalyst and Subsequent Micropatterning of Silicon Substrate by Wet Chemical Etching
نویسندگان
چکیده
منابع مشابه
Nano/Micro-Patterning of Semiconductors by Site Selective Chemical Etching Using Noble Metals as Catalyst
Controlled silicon structures on the micron to nanometer order have received much attention owing to their potential applications in various fields such as electrochemical, optoelectrical, and biological sciences. Although the techniques commonly used in fabricating nano-/microstructured silicon are conventional lithographic techniques using a resist mask with an optical, electron, or X-ray bea...
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ژورنال
عنوان ژورنال: Electrochemistry
سال: 2008
ISSN: 2186-2451,1344-3542
DOI: 10.5796/electrochemistry.76.187